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Chen, LiangChao and Qiao, Yan and Wu, NaiQi and Ghahramani, Mohammadhossein and Shao, YongHua and Zhan, SiJun (2025) Workload Balancing for Photolithography Machines in Semiconductor Manufacturing via Estimation of Distribution Algorithm Integrating Kmeans Clustering. IEEE Transactions on Systems, Man, and Cybernetics: Systems. pp. 1-16. ISSN 2168-2216

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